Profilometry data			
			
sample no	groove no	# of coats	thickness (A)
11	1	1	1210
		1	1450
		1	1425
		1	1170
	2	1	1680
		1	1735
		1	1035
		1	1695
	3	1	1600
		1	1460
		1	965
		1	1305
12	1	1	1235
		1	880
		1	1000
		1	1115
		1	1090
	2	1	995
		1	1155
		1	1170
		1	1045
	3	1	1165
		1	965
		1	1010
		1	1030
21	1	2	3120
		2	3055
		2	3380
		2	3160
	2	2	3295
		2	2895
		2	3335
		2	2505
	3	2	3335
		2	2680
		2	3080
22	1	2	2445
		2	2330
		2	2750
		2	3350
	2	2	2935
		2	3095
		2	2650
		2	2770
	3	2	2795
		2	3170
		2	3565
		2	3165
31	1	3	3385
		3	3845
		3	4010
		3	4205
	2	3	4245
		3	4220
		3	4120
		3	3565
	3	3	4520
		3	4385
		3	3995
		3	4210
32	1	3	5540
		3	5420
		3	3895
		3	3495
		3	4610
	2	3	4470
		3	3710
		3	3790
		3	3725
	3	3	4420
		3	4575
		3	4210
		3	4880
41	1	4	5640
		4	6490
		4	6015
		4	5220
	2	4	4995
		4	4870
		4	5485
		4	5740
	3	4	6105
		4	6665
		4	5600
		4	5725
42	1	4	5790
		4	5600
		4	5285
		4	5310
	2	4	5205
		4	4545
		4	4790
		4	5375
	3	4	5305
		4	5965
		4	4905
		4	4825
51	1	5	7920
		5	5830
		5	7475
		5	5065
	2	5	5180
		5	6120
		5	6440
		5	6090
	3	5	5125
		5	5865
		5	5890
52	1	5	6290
		5	6385
		5	6835
		5	6155
	2	5	7725
		5	8105
		5	7755
		5	6705
	3	5	6855
		5	5855
		5	7125
		5	7330
61	1	6	8325
		6	8670
		6	7450
		6	7270
		6	7415
	2	6	7305
		6	6750
		6	8490
		6	7975
	3	6	8155
		6	7430
		6	7160
		6	9675
		6	9585
		6	8710
62	1	6	7705
		6	9215
		6	7850
		6	8540
	2	6	8365
		6	7900
		6	8400
		6	8135
	3	6	8720
		6	8630
		6	8680
		6	8510
Ellipsometry data		
		
632.8 nm 70 deg thin slide		
		
sample no	# of coats	thickness (A)
11	1	1234.23
	1	1547.91
	1	1339.47
	1	1067.65
	1	1193.9
	1	1226.9
	1	833.14
	1	1239.53
	1	903.03
	1	887.21
12	1	1195.61
	1	1292.52
	1	1060.45
	1	1013.07
	1	797.91
	1	1008.61
	1	1006.73
	1	1165.19
	1	944.07
	1	1241.23
21	2	3323.47
	2	3340.68
	2	3281.89
	2	3288.19
	2	3241.97
	2	3420.79
	2	3469.87
	2	3350.84
	2	3242.45
	2	3510.36
22	2	2871.38
	2	2692.15
	2	2939.6
	2	2729.85
	2	2605.58
	2	2387.63
	2	2653.55
	2	2713.06
	2	2604.83
	2	2973.07
31	3	3998.23
	3	3810.23
	3	3878.79
	3	4311.55
	3	3412.55
	3	3476.89
	3	3675.29
	3	3689.51
	3	3720.25
	3	3726.83
32	3	4790.98
	3	4380.65
	3	4691.28
	3	4016.93
	3	3856.82
	3	3729.5
	3	4040.39
	3	3367.74
	3	4011.15
	3	4172.87
41	4	5685.14
	4	4810.29
	4	5381.35
	4	5569.45
	4	5170.11
	4	4867.28
	4	5256.61
	4	4682.19
	4	4790.34
	4	4974.83
42	4	5730.46
	4	5415.48
	4	5341.51
	4	5330.67
	4	5400.13
	4	5162.55
	4	4839.2
	4	4404.32
	4	5166.12
	4	5446.3
51	5	5382.14
	5	5442.38
	5	5877.86
	5	5455.66
	5	5557.17
	5	5663.27
	5	5487.65
	5	5321.9
	5	7014.23
	5	7162.17
52	5	5869.96
	5	7281.55
	5	5505.59
	5	5784.39
	5	6009.61
	5	5608.07
	5	5706.6
	5	5722.49
	5	5765.75
	5	6562.87
61	6	7818.26
	6	8543.03
	6	8048.08
	6	7975.28
	6	7801.43
	6	8168.33
	6	7901.56
	6	7990.28
	6	8165.46
	6	8217.49
62	6	8047.26
	6	7979.48
	6	7922.98
	6	7973.45
	6	8119.66
	6	8409.01
	6	8726.46
	6	9110.14
	6	8195.8
	6	8261.01
		
		
		
		
		
632.8 nm 50 deg thin slide		
		
sample no	# of coat	thickness (A)
11	1	1002.76
	1	1353.63
	1	1316.38
	1	1382.6
	1	1261.99
	1	1082.89
	1	1066.6
	1	875
	1	958.57
	1	877.74
12	1	1455.7
	1	1211.86
	1	1501.29
	1	959.12
	1	1009.59
	1	1019.25
	1	999
	1	844.11
	1	1061.6
	1	1174.41
21	2	3175.72
	2	3154.44
	2	3259.6
	2	3255.23
	2	3020.28
	2	3222.43
	2	3150.79
	2	3007.67
	2	3143.89
	2	3159
22	2	2882.47
	2	2986.35
	2	2591.91
	2	2636.34
	2	2562.18
	2	2721.8
	2	2753.48
	2	2804.15
	2	2507.71
	2	2381.97
31	3	4513.65
	3	4656.44
	3	3665.4
	3	4546.73
	3	3347.94
	3	3595.09
	3	3587.13
	3	3694.23
	3	3712.37
	3	3765.51
32	3	4303.87
	3	4519.17
	3	3766.42
	3	4014.44
	3	4725.15
	3	3638.8
	3	3552.45
	3	4459.27
	3	4415.5
	3	3636.16
41	4	5690.62
	4	5400.04
	4	5426.76
	4	5214.48
	4	5043.27
	4	5587.78
	4	5086.44
	4	4763.03
	4	5035.32
	4	5385.79
42	4	5201.67
	4	5518.72
	4	4967.36
	4	4833.07
	4	5010.66
	4	4787.25
	4	5264.07
	4	5031.44
	4	5392.21
	4	5584.53
51	5	5685.46
	5	7060.29
	5	7059.56
	5	6823.61
	5	5878.13
	5	7329.98
	5	5477.56
	5	5513.45
	5	7120.57
	5	5527.21
52	5	6679.85
	5	7054.5
	5	6755.53
	5	7156.58
	5	5507.78
	5	7001.07
	5	6876.71
	5	7001.46
	5	5832.12
	5	6965.92
61	6	7819.88
	6	7883.37
	6	8296.05
	6	7890.28
	6	7558
	6	7595.94
	6	9045.36
	6	7668.73
	6	8825.9
	6	7602.06
62	6	9123.63
	6	9263.03
	6	9219.07
	6	7654.35
	6	7623.95
	6	7599.38
	6	9079.36
	6	9121.73
	6	7544.36
	6	7549.78